A process-independent run-to-run controller and its application to chemical-mechanical planarization
JR Moyne, R Telfeyan, A Hunvitz… - Proceedings of SEMI …, 1995 - ieeexplore.ieee.org
The controller design utilizes a Generic Cell Controller (GCC) enabler; thus it is process-independent,
and the controller implementation software exhibits a high degree of portability, …
and the controller implementation software exhibits a high degree of portability, …
A multilevel approach to the control of a chemical–mechanical planarization process
R Telfeyan, J Moyne, N Chaudhry, J Pugmire… - Journal of Vacuum …, 1996 - pubs.aip.org
A multilevel hierarchical control system has been designed and is being applied to chemical–mechanical
planarization (CMP) process control. The current implementation of the control …
planarization (CMP) process control. The current implementation of the control …
[PDF][PDF] Demonstration of a process-independent run-to-run controller
R Telfeyan, J Moyne, A Hurwitz, J Taylor - 187th Meeting of the …, 1995 - telf.com
A process-independent generic cell controller (GCC) has been developed as a part of a
supervisory control framework for semiconductor manufacturing processes. It can function in a …
supervisory control framework for semiconductor manufacturing processes. It can function in a …
[PDF][PDF] A run-to-run control framework for VLSI manufacturing
N Chaudhry, R Telfeyan, B Moore, H Etemad… - Techcon '93 Conference …, 1993 - telf.com
A framework has been developed for the Run-to-Run (R2R) control and optimization of VLSI
manufacturing processes. The framework is one component of the Michigan Sequential …
manufacturing processes. The framework is one component of the Michigan Sequential …
Frailty Models for Commercial Mortgages
X Chen, E Ghysels, R Telfeyan - The Journal of Fixed Income, 2016 - search.proquest.com
This article presents a reduced-form model that contains frailty factors to predict mortgage
default and develops a novel framework to model systematic risk of mortgages. We match …
default and develops a novel framework to model systematic risk of mortgages. We match …
Run by run control of chemical-mechanical polishing
… Roland Telfeyan received the BS degree in mathematics and the BM degree in music
theory from Northwestern University, Evanston, IL, in 1985 and 1988, respectively, and the MM …
theory from Northwestern University, Evanston, IL, in 1985 and 1988, respectively, and the MM …
A design methodology for databases with uncertain data
NA Chaudhry, JR Moyne… - … Working Conference on …, 1994 - ieeexplore.ieee.org
… The help of Hossein Etemad, Roland Telfeyan and Brian Moore in developing the GCC
is also gratefully acknowledged. … Telfeyan, B. Moore, H. Etemad and J. …
is also gratefully acknowledged. … Telfeyan, B. Moore, H. Etemad and J. …
Run-to-run control framework for VLSI manufacturing
JR Moyne, H Etemad, ME Elta - … Processes, Sensors, and …, 1994 - spiedigitallibrary.org
A run-to-run (R2R) control framework has been developed for application to supervisory
control of semiconductor manufacturing processes. This generic framework, which is being …
control of semiconductor manufacturing processes. This generic framework, which is being …
[PDF][PDF] Muscianship at Northwestern
J Buccheri - Journal of Music Theory Pedagogy, 1990 - digitalcollections.lipscomb.edu
… The ScoreScan and Imager programs (designed by John Buccheri and written by Roland
Telfeyan) focus on score analysis techniques for the rapid recognition of harmonic and tonal …
Telfeyan) focus on score analysis techniques for the rapid recognition of harmonic and tonal …
[CITATION][C] Aug. 1995." A Process-Independent Run-to-Run Controller and Its Application to Chemical-Mechanical Planarization." SEMI/IEEE Advanced …
J Moyne, R Telfeyan, A Hurwitz, J Taylor - Ann Arbor, Michigan: The University of …, 1995